Login

We are experiencing technical difficulties. Your form submission has not been successful. Please accept our apologies and try again later. Details: [details]

Download

Register

We are experiencing technical difficulties. Your form submission has not been successful. Please accept our apologies and try again later. Details: [details]

Download

Thank you for registering

An email to complete your account has been sent to

Return to the website

get direct access

Fill in your details below and get direct access to content on this page

Text error notification

Text error notification

Checkbox error notification

Checkbox error notification

We are experiencing technical difficulties. Your form submission has not been successful. Please accept our apologies and try again later. Details: [details]

Download

Thank you for your interest

You now have access to Safety Network

A confirmation email has been sent to

Continue to page

Please or get direct access to download this document

The safety network in the semiconductor manufacturing equipment is important for process optimization, yield improvement, and quality control. Our safety control system, developed over many years, enhances yield and maintains the quality of the process tool.

Application: Safety control by open network protocol

As equipment evolves, the need for networked safety control has increased from traditional hard-wired safety control. However, it is very difficult to control the equipment itself by using separate networks for safety control and standard control within the equipment.

Our Solution: Programmable Safety System

OMRON offers a programmable safety system with an open network. By using Safety over EtherCAT (FSoE), we enable the integration of both safety and standard control systems. This makes it possible to manage the control and safety systems together, instead of separately.

The shift to equipment control using a network can contribute to future equipment scalability, such as an increase in the number of I/O points and unifying the network with EtherCAT can also improve the data processing capacity of the entire equipment.

Enabling Technologies

Safety Open Network Protocol

By using the Safety over EtherCAT - FSoE - protocol, we can integrate safety control into machine control through open network technology. Both the safety controller and the safety I/O can be freely distributed in an I/O configuration throughout the network, mixing them in any combination with standard NX I/O.

Related Products

nx safety fsoe log0 prod

Integrated safety into machine automation

The Sysmac automation platform integrates the safety solution within our one connection and one software concept. One connection is realised through the use of Safety over EtherCAT - FSoE - protocol. The one software is achieved by using the Sysmac Studio for configuration, programming and maintenance. The NX safety system consists of safety controller and safety I/O units. Both the safety controller and safety I/O can be freely distributed in an I/O rack throughout the network, mixing them in any combination with standard NX I/O.

Read more
nx safetyuct press white prod

NX Stand-alone Safety Controller

NX-Safety Stand-alone is a powerful, modular and easily commissioned safety controller which, due to its scalability, can be efficiently adapted to the requirements of a wide variety of safety applications. Thanks to this modular and expandable hardware, the compact safety controller grows with its task slice-by-slice – right up to the highest safety level. You can grow up to 256 I/O points in one single Safety CPU. The design of safe system solutions is thus considerably simplified.

Read more

Do you want to know more?

Contact Our Experts

+44 (0)870 752 0861
Contact us

Contact me Safety Network

semiconductor manufacturing application 1414159179 neonline bboard en sol

Please, complete all the fields marked with *. Your personal details will be handled confidentially.

Text error notification

Text error notification

Text error notification

Text error notification

Text error notification

Country error notification

Details

Text area error notification

Checkbox error notification

Checkbox error notification

Thank you for submitting your request. We will come back to you as soon as possible.

We are experiencing technical difficulties. Your form submission has not been successful. Please accept our apologies and try again later. Details: [details]

Download
+44 (0)870 752 0861
+44 (0)870 752 0861

We use cookies on our website

These cookies enhance your website experience, improve the quality of our site and help us show you content and advertisement that is more likely to be relevant to you. We also allow third parties (including our social media and advertising partners) to place cookies on our website. 

By clicking 'Accept all cookies' you agree to the placement and use of cookies as described in our cookie policy. If you only want to allow functional cookies click ‘Accept essential cookies’ and if you want to finetune the cookies we can use, click 'Manage cookies'.