Detection in vacuum chamber
A vacuum-resistant reflector enables stable detection in a vacuum chamber.
Challenge
Placing sensors in a vacuum chamber is problematic because the haze that develops on view ports or lenses on sensors obscures the view and causes detection failure.
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Solution
The combination of an intelligent sensor and vacuum-resistant reflector enables stable detection. You can place the reflector for an optical retro-reflection sensor in a vacuum chamber, allowing the detection of wafers/glass through one view port. Even though the view ports become covered with mist, the sensor can recognize the drop in optical reflected value, and automatically change the threshold in proportion with the optical value.
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Benefit
Easy maintenance with stable detection over an extended period of time and an increase in equipment reliability through reduced sensing error.
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