Nozzle gap measurement
Our sensor has a separate emitter and receiver which allow you to measure precisely the right point for inspection of the wafer.
Challenge
To inspect the surface of a wafer it is necessary to adjust the height between inspection nozzle and surface of the wafer. To correctly focus the inspection point with the lens, the measured point should be just under the nozzle.
|
 |
Solution
Omron offers a measurement sensor with separate emitter and receiver. It allows you to measure precisely the right point for inspection.
|
Benefit
Inspection throughput can be improved by shortening the adjustment time for focusing on the surface.
|
|