FOUP ID management
An automatic and reliable transfer system with SEMI standard for FOUP management.
Challenge
For 300mm FOUP management, faulty reading of the carrier ID causes manufacturing-line stoppage. The identification system has to be installed at precisely the right position and adjusted easily.
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Solution
Omron's RFID system realizes distributed information management by storing the process instruction, such as product information and production completion, in the ID tags embedded in FOUP. The protocol and dimension conforms to SEMI standard (SEMI E4, E5, E99.1).
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Benefit
The reliability ensures an automatic transfer system in which manufacturing efficiency can be maintained and traceability improved. SEMI standard conformity enables machine builders to standardize the specification of the design.
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