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Material Handling

Omron has considerable in-depth experience in the area of material handling, especially in the semiconductors branch, where it has provided sensing and control solutions for enhancing process performance, ensuring high productivity and safety, as well as environmental friendliness.

Solutions include those for wafer detection, mapping, centralization and slide-out, as well as FOUP presence and management, and flatness/position measurement for wafer grippers using compact laser sensors.

Material Handling Applications 2D Code on wafer decoder With a Omron 2D code reader you can read the hard to read wafer surface. >> Flatness/ position measurement for wafer gripper A compact laser measurement sensor is crucial for wafer handling. >> FOUP ID management An automatic and reliable transfer system with SEMI standard for FOUP management. >> FOUP presence sensor Detect FOUP cassettes reliable without no matter the color of surface or shape of FOUP. With SEMI standard. >> Wafer centralization Use a high-speed CCD to measure accurately and quickly. >> Wafer detection Use a single fiber sensor for stable wafer detection with difficult surface conditions. >> Wafer mapping To detect wafers correctly use fiber heads with a narrow beam from which the tilt can be adjusted easily. >> Wafer slide-out Prevent a wafer slide-out with laser coaxial retro-reflective type sensors. >>

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Material Handling

Material Handling Applications